Heidelberg Instruments
VerifiedWebsite, address and certifications confirmed by forUdyog researchTrustedIn business since 2006 or earlier, quality certified, with exports or industrial customers on recordHigh-precision laser lithography systems, maskless aligners and nanofabrication tools.
Overview
It develops and builds direct-write lithography systems for micro- and nanofabrication. Over 1,500 systems are installed in more than 50 countries. Customers include universities, research institutes and industrial manufacturers.
The product range runs from compact tabletop systems for prototyping and R&D to photomask production equipment for high-volume industry. The systems cover 2D patterning and 2.5D grayscale lithography. Application areas include micro-optics, photonics, semiconductors and advanced packaging, MEMS, quantum devices, microfluidics, displays and 2D materials.
Process and Application Labs in Germany, Switzerland and China provide customer training and process support. The company has subsidiaries in Switzerland, the USA, China, Japan, South Korea and Taiwan, and works with sales partners in other regions. It is part of the LAB14 Group.
Products
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Catalogues & brochures
Certifications
1 listed
ISO 9001Factory & locations
Heidelberg Instruments
VerifiedTrustedHigh-precision laser lithography systems, maskless aligners and nanofabrication tools.
Overview
It develops and builds direct-write lithography systems for micro- and nanofabrication. Over 1,500 systems are installed in more than 50 countries. Customers include universities, research institutes and industrial manufacturers.
The product range runs from compact tabletop systems for prototyping and R&D to photomask production equipment for high-volume industry. The systems cover 2D patterning and 2.5D grayscale lithography. Application areas include micro-optics, photonics, semiconductors and advanced packaging, MEMS, quantum devices, microfluidics, displays and 2D materials.
Process and Application Labs in Germany, Switzerland and China provide customer training and process support. The company has subsidiaries in Switzerland, the USA, China, Japan, South Korea and Taiwan, and works with sales partners in other regions. It is part of the LAB14 Group.
- Founded
- 1984
- Headquarters
- Heidelberg, Germany
- Installed systems
- Over 1,500 in more than 50 countries
- Group
- Part of the LAB14 Group
- Subsidiaries
- Switzerland, USA, China, Japan, South Korea, Taiwan
- Indian partner
- Labindia Instruments Pvt. Ltd., Gurgaon
Products
µMLA Maskless AlignerTabletopMaskless aligner
MLA 150 Maskless AlignerMaskless aligner450 nm lines and spaces
MLA 300 Maskless Aligner1.5 µm min. featureUp to 315 x 315 mmSECS/GEM, OPC-UA
DWL 66+ Laser Lithography System200 nm featuresGrayscale
DWL 2000 GS / DWL 4000 GS Laser Lithography SystemsGrayscaleIndustrial
VPG+ 200 / VPG+ 400 / VPG+ 800 Volume Pattern GeneratorsPhotomask production
VPG+ 1400 FPD / VPG+ 1850 FPD Volume Pattern GeneratorsLarge-substrate photomasksFPD
VPG 300 DI Maskless StepperMaskless stepperDirect imaging
ULTRA Semiconductor Mask WriterLaser mask writer
NanoFrazor Nanolithography ToolThermal scanning probe lithographyDirect laser sublimation
Documents
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