LINTEC Co., Ltd.
Mass flow controllers, vaporizers and heat exchangers for semiconductor fluid control
Overview
It states that it was the first company in the world to develop a liquid mass flow controller for TEOS flow control, together with a vaporization system for precise TEOS flow rates.
The product range covers gas and liquid mass flow controllers and meters, direct-vaporization vaporizers (including quartz, high-flow and non-carrier types), compact and high-temperature heat exchangers, and supply systems. It also builds cabinets that integrate these products to customer requirements.
Headquarters and factory are in Otsu-shi, Shiga, with a second factory in Shiga and a manufacturing subsidiary, JP LINTEC, in Penang, Malaysia. A sales office is in Shinjuku, Tokyo.
Products
6 listedVideos
Catalogues & brochures
Certifications
2 listed
ISO 9001As stated by the company
- ISO 14001Source
Factory & locations
LINTEC Co., Ltd.
Mass flow controllers, vaporizers and heat exchangers for semiconductor fluid control
Overview
It states that it was the first company in the world to develop a liquid mass flow controller for TEOS flow control, together with a vaporization system for precise TEOS flow rates.
The product range covers gas and liquid mass flow controllers and meters, direct-vaporization vaporizers (including quartz, high-flow and non-carrier types), compact and high-temperature heat exchangers, and supply systems. It also builds cabinets that integrate these products to customer requirements.
Headquarters and factory are in Otsu-shi, Shiga, with a second factory in Shiga and a manufacturing subsidiary, JP LINTEC, in Penang, Malaysia. A sales office is in Shinjuku, Tokyo.
- Founded
- October 2, 1987
- Headquarters
- 4-1-23 Sekinotsu, Otsu-shi, Shiga, Japan
- Capital
- 98 million yen
- Factories
- Shiga (2 sites), Japan; Penang, Malaysia
- Tokyo sales office
- Yotsuya, Shinjuku-ku, Tokyo
Products
Gas Mass Flow Controllers / MetersEtherCATDeviceNetFast response
Liquid Mass Flow Controllers / Meters±1% F.S.RS-485Metal seal
VaporizersQuartz typeNon-carrier typeHigh flow
Heat Exchangers / Gas HeatersCompactHigh temperatureHigh flow rate
Supply Systems
MFC AccessoriesUp to 9 MFCs (PS series)
Contact
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Factory
- Headquarters & main factory
- JP LINTEC (manufacturing subsidiary)