Overview

Onto Innovation is a process control company whose portfolio spans the semiconductor value chain. Its technologies cover unpatterned wafer quality, 3D metrology from nanometer-scale transistors to large die interconnects, macro defect inspection of wafers and packages, metal interconnect composition, factory analytics, and lithography for advanced semiconductor packaging.

Its products help customers address yield, device performance, quality and reliability issues. The company is headquartered in Wilmington, Massachusetts, and supports customers through a worldwide sales and service organisation, with local support pages for China, Europe, Japan, Korea, Malaysia, Singapore, Taiwan, USA and Vietnam.

Onto also offers service programs, technical training, and a Packaging Applications Center of Excellence focused on panel-level packaging for 2.5D, FOPLP, 3D chiplet and AI packages on glass and organic substrates.

Headquarters

Wilmington, Massachusetts, USA

Product families

4Di, Aspect, Atlas, Discover, Dragonfly, Element, FAaST, IMPULSE, Iris, IVS, JetStep, PrimaScan

Market segments

Wafer & panel manufacturing, CMOS, specialty, advanced packaging, industrial

Products

• Dragonfly® G5 System2D inspection3D metrologyIR imaging
• Dragonfly® G3 System2D inspection3D metrology
• Iris™ S System150/200/300mm wafersFilm metrologyOCD
• IMPULSE® V SystemCMP metrologyAI analytics
• Aspect® SystemIRCDNon-destructiveIn-line
• EB40™ ModuleEdge inspectionBackside inspection
• Discover® Defect SoftwareDefect managementSoftware
• TrueADC® SoftwareDeep learningADCSoftware
• Advanced packaging lithography steppersStepperPanel-level

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