Park Systems
Nanoscale microscopy and metrology systems built around atomic force microscopy
Overview
Park Systems develops and sells nanoscale microscopy and metrology equipment. It started with atomic force microscopy (AFM). The portfolio now also covers imaging spectroscopic ellipsometry, nanoscale IR spectroscopy (AFM-IR), white light interferometry, digital holographic microscopy and active vibration isolation.
The company was established in Korea in 1997. It is listed on KOSDAQ and has grown by acquiring Accurion GmbH (ellipsometry and vibration isolation, 2022) and Lyncée Tec SA (digital holographic microscopy, 2025). It states that it opened a new global headquarters in Gwacheon City in 2026.
Industrial AFM systems are automated for semiconductor wafer processing, photomask repair, advanced packaging, flat panel display and hard-disk media inspection. Research AFMs serve materials science, chemistry and life science. The company reports a network covering over 70 countries with 16 regional offices, working through direct offices and distributors.
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Park Systems
Nanoscale microscopy and metrology systems built around atomic force microscopy
Overview
Park Systems develops and sells nanoscale microscopy and metrology equipment. It started with atomic force microscopy (AFM). The portfolio now also covers imaging spectroscopic ellipsometry, nanoscale IR spectroscopy (AFM-IR), white light interferometry, digital holographic microscopy and active vibration isolation.
The company was established in Korea in 1997. It is listed on KOSDAQ and has grown by acquiring Accurion GmbH (ellipsometry and vibration isolation, 2022) and Lyncée Tec SA (digital holographic microscopy, 2025). It states that it opened a new global headquarters in Gwacheon City in 2026.
Industrial AFM systems are automated for semiconductor wafer processing, photomask repair, advanced packaging, flat panel display and hard-disk media inspection. Research AFMs serve materials science, chemistry and life science. The company reports a network covering over 70 countries with 16 regional offices, working through direct offices and distributors.
- Founded
- 1997 (Park Systems Corp., Korea)
- Headquarters
- Gwacheon City, Gyeonggi-do, Korea
- Employees
- More than 600
- Global network
- 70+ countries, 16 regional offices
- Stock listing
- KOSDAQ (since 2015)
- Acquisitions
- Accurion GmbH (2022), Lyncée Tec SA (2025)
Products
Park NX1 research AFMAtomic-scale imagingAmbient conditions
Park FX40 IRNano-IRAutomated AFM- Research AFM rangeSmall sampleLarge sampleNano-IR
- Industrial AFMAutomatedWafer metrologyPhotomask repair
Imaging spectroscopic ellipsometersImaging ellipsometryThin-film characterisation- Digital holographic microscopes (Lyncée)Reflection seriesTransmission series
- White light interferometer (NX-Hybrid WLI)Non-contact3D optical metrology
Active vibration isolationDesktop tablesModular elementsAcoustic enclosures- AFM probes and Nano Standard samplesAFM probesCalibration samples
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