Overview

SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE) is a SCREEN Holdings Group company in Kyoto, Japan. It builds equipment for semiconductor device manufacturing, covering both 300 mm leading-edge production and 200 mm and smaller wafer lines.

Its product range includes wet stations, single-wafer cleaners and spin scrubbers, coat/develop tracks, a flash lamp annealer, film thickness measurement systems, wafer pattern inspection systems, advanced-packaging lithography and a photomask dimension measurement system. It has developed single-wafer cleaning equipment since 1983.

The company also offers global service, including the SSi technical information service and S-POS, and lists a Japanese and international sales and service network.

Parent group

SCREEN Holdings Co., Ltd.

Headquarters

Kyoto, Japan

Main product areas

Wafer cleaning, coat/develop, annealing, measurement, inspection, packaging lithography

Cleaning equipment experience

Single-wafer cleaning since 1983

Products

• SU-3400 Single Wafer Cleaner300 mmAqua spin24 chambers
• DT-3000 (SOKUDO DUO) Coat/Develop Track200-300 mmSOKUDODual track
• SB-3300 Backside Cleaner (Spin Scrubber, Brush and Chemical Cleaning)300 mmBrush + chemical
• SS-3300S Spin Scrubber300 mm16 chambersUp to 1,000 WPH
• FC-3100 Wet StationWet station
• SP-2100 Spin ProcessorSpin processor
• RE-3500 Ellipsometric Film Thickness Measurement SystemEllipsometricFilm thickness
• VM-2500/VM-3500 Spectroscopic Film Thickness Measurement SystemSpectroscopicFilm thickness
• ZI-3600 / ZI-2000 Wafer Pattern Inspection SystemPattern inspection
• DW-3100 Direct Imaging System for Advanced PackagesDirect imagingPLP version

Contact