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ULVAC

Industrial vacuum solutions built on vacuum technology since 1952

Chigasaki, KanagawaElectronics · Semiconductors
ULVAC

Overview

ULVAC, Inc. was established on August 23, 1952 and is headquartered in Chigasaki, Kanagawa, Japan. It is a vacuum equipment manufacturer whose work runs from advanced semiconductors and quantum computing to rare-earth magnets and batteries.

The group covers development, manufacture, sales, customer support and machinery import/export of vacuum equipment, peripheral devices, vacuum components and materials. Its customers are in the display, semiconductor, electronics, metals, automotive, chemical, food and pharmaceutical industries, and at universities and research centres. It also provides research guidance and technical consulting on vacuum technology.

ULVAC works through six business areas: semiconductor and electronic device production equipment; display and energy-related production equipment; industrial and rare earth-related equipment; components; materials; and surface analysis and coating. The company has positioned its semiconductor and electronic device business at the core of its growth. The group lists 41 companies, including a Singapore company, ULVAC SINGAPORE PTE LTD.

Established in 1952; headquartered in Chigasaki, Kanagawa, Japan
Equipment for memory, logic, power semiconductors, MEMS, communication and optical devices
Vacuum pumps, gauges, process gas monitors, helium leak detectors and cryopumps
Sputtering targets plus tantalum and niobium materials
XPS, AES and SIMS surface analysis instruments
Received the 2025 TSMC Excellent Performance Award and the SK hynix Best Partner Award

Products

6 listed

Videos

Catalogues & brochures

Factory & locations

ULVAC, Inc. Head Office / PlantJapan

ULVAC

Industrial vacuum solutions built on vacuum technology since 1952

Chigasaki, Kanagawa

Overview

ULVAC, Inc. was established on August 23, 1952 and is headquartered in Chigasaki, Kanagawa, Japan. It is a vacuum equipment manufacturer whose work runs from advanced semiconductors and quantum computing to rare-earth magnets and batteries.

The group covers development, manufacture, sales, customer support and machinery import/export of vacuum equipment, peripheral devices, vacuum components and materials. Its customers are in the display, semiconductor, electronics, metals, automotive, chemical, food and pharmaceutical industries, and at universities and research centres. It also provides research guidance and technical consulting on vacuum technology.

ULVAC works through six business areas: semiconductor and electronic device production equipment; display and energy-related production equipment; industrial and rare earth-related equipment; components; materials; and surface analysis and coating. The company has positioned its semiconductor and electronic device business at the core of its growth. The group lists 41 companies, including a Singapore company, ULVAC SINGAPORE PTE LTD.

Established
August 23, 1952
Headquarters
2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan
Capital
JPY 20,873,042,500
Employees
1,648 (consolidated: 6,132), as of June 30, 2025
Net sales
JPY 251.2B (FY2025, ended June 30, 2025)
Group companies
41
R&D capital expenditure
JPY 22.8B (FY2025)

Products

  • Semiconductor and electronic device production equipmentSemiconductor and electronic device production equipmentMemoryLogicPower semiconductors
  • Display and energy-related production equipmentDisplay and energy-related production equipmentRoll coaterDeposition
  • Industrial equipment and rare earth-related production equipmentIndustrial equipment and rare earth-related production equipmentVacuum furnacesLeak test systemsLyophilizers
  • Vacuum componentsVacuum componentsVacuum pumpsGaugesHelium leak detectors
  • Sputtering targets and functional materialsSputtering targets and functional materialsSputtering targetsTantalumNiobium
  • Surface analysis instruments and mask blanksSurface analysis instruments and mask blanksXPSAESSIMS

Documents

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Factory

  • ULVAC, Inc. Head Office / Plant

In Machinery & Suppliers