
ULVAC
Industrial vacuum solutions built on vacuum technology since 1952
Overview
ULVAC, Inc. was established on August 23, 1952 and is headquartered in Chigasaki, Kanagawa, Japan. It is a vacuum equipment manufacturer whose work runs from advanced semiconductors and quantum computing to rare-earth magnets and batteries.
The group covers development, manufacture, sales, customer support and machinery import/export of vacuum equipment, peripheral devices, vacuum components and materials. Its customers are in the display, semiconductor, electronics, metals, automotive, chemical, food and pharmaceutical industries, and at universities and research centres. It also provides research guidance and technical consulting on vacuum technology.
ULVAC works through six business areas: semiconductor and electronic device production equipment; display and energy-related production equipment; industrial and rare earth-related equipment; components; materials; and surface analysis and coating. The company has positioned its semiconductor and electronic device business at the core of its growth. The group lists 41 companies, including a Singapore company, ULVAC SINGAPORE PTE LTD.
Products
6 listedVideos
Catalogues & brochures
Factory & locations

ULVAC
Industrial vacuum solutions built on vacuum technology since 1952
Overview
ULVAC, Inc. was established on August 23, 1952 and is headquartered in Chigasaki, Kanagawa, Japan. It is a vacuum equipment manufacturer whose work runs from advanced semiconductors and quantum computing to rare-earth magnets and batteries.
The group covers development, manufacture, sales, customer support and machinery import/export of vacuum equipment, peripheral devices, vacuum components and materials. Its customers are in the display, semiconductor, electronics, metals, automotive, chemical, food and pharmaceutical industries, and at universities and research centres. It also provides research guidance and technical consulting on vacuum technology.
ULVAC works through six business areas: semiconductor and electronic device production equipment; display and energy-related production equipment; industrial and rare earth-related equipment; components; materials; and surface analysis and coating. The company has positioned its semiconductor and electronic device business at the core of its growth. The group lists 41 companies, including a Singapore company, ULVAC SINGAPORE PTE LTD.
- Established
- August 23, 1952
- Headquarters
- 2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan
- Capital
- JPY 20,873,042,500
- Employees
- 1,648 (consolidated: 6,132), as of June 30, 2025
- Net sales
- JPY 251.2B (FY2025, ended June 30, 2025)
- Group companies
- 41
- R&D capital expenditure
- JPY 22.8B (FY2025)
Products
Semiconductor and electronic device production equipmentMemoryLogicPower semiconductors
Display and energy-related production equipmentRoll coaterDeposition
Industrial equipment and rare earth-related production equipmentVacuum furnacesLeak test systemsLyophilizers
Vacuum componentsVacuum pumpsGaugesHelium leak detectors
Sputtering targets and functional materialsSputtering targetsTantalumNiobium
Surface analysis instruments and mask blanksXPSAESSIMS
Documents
Contact
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Factory
- ULVAC, Inc. Head Office / Plant
